Microsystem Technologies · 2020 · 23 citations · 6 references
EngineeringMechanical EngineeringPhysicsHeat TransferMicroelectromechanical SystemsThermodynamicsMems CharacterizationMems DesignMems FabricationMems MaterialsMems ModelingThermal DesignHeat Sink DesignHeat Sink MaterialsHeat SinksThermal CharacterizationThermo-mechanical Design
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