Sensors and Actuators A Physical · 2020 · 21 citations · 17 references
MedicineBioengineeringBiomedical EngineeringBiomedical ImagingUltrasonographyUltrasoundPiezoelectric CeramicsPiezoelectric MaterialsTransducer TechnologyUltrasonicsUltrasound ImagingUltrasound InstrumentationFeasibility Study DesignMicroelectromechanical Systems TransducersMicroscale Piezoelectric DevicesPiezoelectric Transducer DesignUltrasonic Transducer DesignUltrasonic TransducersUltrasound Imaging TransducersUltrasound Transducer Design
17
Thin Film Piezoelectrics for MEMS
Susan Trolier‐McKinstry, Paul Muralt · Journal of Electroceramics · 2004 · 1K citations · Full text
Xiaoyue Jiang, Hao-Yen Tang, Yipeng Lu et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2017 · 145 citations
Engineering, Biomedical Engineering, Microelectromechanical Systems +16