IEEE Sensors Journal · 2011 · 197 citations · 17 references
MedicineMechanical EngineeringAcousticsMicroelectromechanical SystemsUltrasoundAcoustic SensingTransducer TechnologyUltrasonicsUltrasound ImagingUltrasound InstrumentationUltrasound PhysicsPiezoelectric ElementsPulse-echo InstrumentationRandom NoiseTime-of-flight MeasurementTransducer FabricationTransducer MaterialsUltrasonic SensingUltrasonic Transducers
An ultrasonic rangefinder operates over 30–450 mm with a 375‑Hz maximum sampling rate. The system uses a single AlN‑membrane transducer for pulse‑echo time‑of‑flight measurement, fabricated via a low‑temperature process compatible with CMOS wafers. The device achieves 1.3 mm noise at 450 mm and outperforms other micromechanical rangefinders.
An ultrasonic rangefinder has a working range of 30 to 450 mm and operates at a 375-Hz maximum sampling rate. The random noise increases with distance and equals 1.3 mm at the maximum range. The range measurement principle is based on pulse-echo time-of-flight measurement using a single transducer for transmit and receive. The transducer consists of a piezoelectric AlN membrane with 400-μm diameter, which was fabricated using a low-temperature process compatible with processed CMOS wafers. The performance of the system exceeds the performance of other micromechanical rangefinders.
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Fundamentals of Physical Acoustics
Philippe Leclaire · Applied Acoustics · 2002 · 639 citations
Natural Sciences, Physics, Acoustics +10