Keiichi Umeda

Influence of scandium concentration on power generation figure of merit of scandium aluminum nitride thin films

Morito Akiyama, Keiichi Umeda, Atsushi Honda et al. · Applied Physics Letters · 2013 · 198 citations

Natural Sciences, Materials Engineering, Materials Science +17

Piezoelectric properties of ScAlN thin films for piezo-MEMS devices

Keiichi Umeda, Hiroyuki Kawai, Akira Honda et al. · 2013 · 105 citations

Natural Sciences, Materials Engineering, Materials Science +14

Giant increase in piezoelectric coefficient of AlN by Mg-Nb simultaneous addition and multiple chemical states of Nb

Masato Uehara, Hokuto Shigemoto, Yuki Fujio et al. · Applied Physics Letters · 2017 · 65 citations

Natural Sciences, Materials Engineering, Materials Science +16

Increase in the piezoelectric response of scandium-doped gallium nitride thin films sputtered using a metal interlayer for piezo MEMS

Masato Uehara, Takaaki Mizuno, Yasuhiro Aida et al. · Applied Physics Letters · 2019 · 32 citations

Engineering, Materials Engineering, Materials Science +17

Characteristics of an AlN-based bulk acoustic wave resonator in the super high frequency range

Keiichi Umeda, Hideki Kawamura, Masaki Takeuchi et al. · Vacuum · 2008 · 26 citations

Natural Sciences, Materials Science, Physics +8