Keiichi Umeda

Influence of scandium concentration on power generation figure of merit of scandium aluminum nitride thin films

Morito Akiyama, Keiichi Umeda, Atsushi Honda et al. · Applied Physics Letters · 2013 · 195 citations

Materials Science, Materials Engineering, Electrical Engineering +12

Piezoelectric properties of ScAlN thin films for piezo-MEMS devices

Keiichi Umeda, Hiroyuki Kawai, Akira Honda et al. · 2013 · 103 citations

Materials Science, Thin Film Physics, Material Analysis +10

Giant increase in piezoelectric coefficient of AlN by Mg-Nb simultaneous addition and multiple chemical states of Nb

Masato Uehara, Hokuto Shigemoto, Yuki Fujio et al. · Applied Physics Letters · 2017 · 65 citations

Aluminium Nitride, Piezoelectric Coefficient D33, Engineering +16

Increase in the piezoelectric response of scandium-doped gallium nitride thin films sputtered using a metal interlayer for piezo MEMS

Masato Uehara, Takaaki Mizuno, Yasuhiro Aida et al. · Applied Physics Letters · 2019 · 29 citations

Aluminium Nitride, Engineering, Gan Films +17

Characteristics of an AlN-based bulk acoustic wave resonator in the super high frequency range

Keiichi Umeda, Hideki Kawamura, Masaki Takeuchi et al. · Vacuum · 2008 · 26 citations

Acoustic Methods, Aeroacoustics, Engineering +8