Publication | Closed Access
Fabricating High-Resolution Metal Pattern with Inkjet Printed Water-Soluble Sacrificial Layer
45
Citations
57
References
2020
Year
Materials ScienceChemical EngineeringEngineeringBeam LithographyFlexible ElectronicsMicrofabricationMechanical EngineeringApplied PhysicsFabrication TechniquePattern TransferPrinted ElectronicsHigh-resolution Metal PatternMetal PatternHigh-resolution Metal PatternsElectronic Packaging3D PrintingNanolithography Method
The metal pattern plays a crucial role in various optoelectronic devices. However, fabrication of high-resolution metal patterns has serious problems including complicated techniques and high cost. Herein, an inkjet printed water-soluble sacrificial layer was proposed to fabricate a high-resolution metal pattern. The water-soluble sacrificial layer was inkjet printed on a polyethylene glycol terephthalate (PET) surface, and then the printed surface was deposited with a metal layer by evaporating deposition. When the deposited surface was rinsed by water, the metal layer deposited on the water-soluble sacrificial layer could be removed. Various high-resolution metal patterns were prepared, which could be used in electroluminescent displays, strain sensors, and 3D switches. This facile method could be a promising approach for fabricating high-resolution metal patterns.
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