Low frequency noise characteristics of resistor- and Si MOSFET-type gas sensors fabricated on the same Si wafer with In2O3 sensing layer

Wonjun Shin, Gyuweon Jung, Seongbin Hong, Yujeong Jeong, Jinwoo Park, Dongkyu Jang, Byung‐Gook Park, Jong‐Ho Lee

Sensors and Actuators B Chemical · 2020 · 57 citations · 48 references

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