Laser‐Patterned Copper Electrodes for Proximity and Tactile Sensors

Abstract

Abstract Proximity and tactile sensors are important in human–machine interaction, which are usually fabricated with complex processes. In this study, a facile assembling method to fabricate these sensors on flexible substrate is presented. Using one‐step laser‐patterned highly conductive Cu electrodes on polyimide sheets and polydimethylsiloxane dielectric layer, single‐pixel proximity sensor with long detecting range and multichannel tactile sensor with high planar sensitivity are fabricated. Both sensors exhibit long term stability and repeatability throughout hundreds of testing cycles. This study highlights a rapid and low cost assembling for fabricating of capacitive sensors.