Journal of Manufacturing Processes · 2019 · 64 citations · 28 references
EngineeringMaterials EngineeringMaterials ScienceMaterials CharacterizationSurface EngineeringSurface ScienceMachiningSemiconductor Device MaterialsSilicon MaterialsSurface MetrologySurface RoughnessSurface Roughness EffectsElectroplated MaterialsMachining-induced RoughnessPolycrystalline SiliconRoughness EvolutionSilicon Wafer ProcessingSurface Roughness MeasurementSurface Roughness Parameters
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