Roles and mechanism analysis of chitosan as a green additive in low-tech node copper film chemical mechanical polishing

Jiakai Zhou, Xinhuan Niu, Zhi Wang, Yaqi Cui, Jianchao Wang, Chenghui Yang, Zhaoqing Huo, Ru Wang

Colloids and Surfaces A Physicochemical and Engineering Aspects · 2019 · 75 citations · 47 references

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