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Study on new method and mechanism of microcutting-etching of microlens array on 6H-SiC mold by combining single point diamond turning with ion beam etching

Materials EngineeringMaterials ScienceEngineeringMicrofabricationFabrication TechniqueIon BeamPlasma EtchingSingle Point DiamondMicroelectronics6H-sic MoldNanolithography MethodMicrostructure