Concepedia

Study on new method and mechanism of microcutting-etching of microlens array on 6H-SiC mold by combining single point diamond turning with ion beam etching

Tianfeng Zhou, Ruzhen Xu, Benshuai Ruan, Yupeng He, Zhiqiang Liang, Xibin Wang

Journal of Materials Processing Technology · 2019 · 29 citations · 29 references

DOI

Concepts

References

29

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 792 citations

, , +13

Brittle–ductile transition during diamond turning of single crystal silicon carbide

Saurav Goel, Xichun Luo, Paul Comley et al. · International Journal of Machine Tools and Manufacture · 2012 · 211 citations

, , +15

Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo

Mao Mukaida, Jiwang Yan · International Journal of Machine Tools and Manufacture · 2016 · 188 citations

, , +12

An empirical formula for angular dependence of sputtering yields

Y. Yamamura, Shigeru Shindo · Radiation Effects · 1984 · 114 citations

, , +9