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Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo

Materials ScienceDuctile MachiningEngineeringMicrofabricationMaterial MachiningMechanical EngineeringFabrication TechniqueSlow Tool ServoUltraprecision DiamondMachiningMicro-optical ComponentMicroelectronicsMicrostructure