Publication | Closed Access
Analysis of growth rate and crystal quality of AlN epilayers by flow-modulated metal organic chemical vapor deposition
16
Citations
29
References
2019
Year
Materials ScienceMaterials EngineeringAluminium NitrideEngineeringGrowth RateCrystal Growth TechnologySurface ScienceApplied PhysicsAln EpilayersCrystal QualityChemical DepositionChemical Vapor DepositionMicrostructure
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