Applied Surface Science · 2019 · 13 citations · 34 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsField-effect TransistorsMetal-oxide-semiconductor Field-effect TransistorsNanoelectronicsSemiconductor Device MaterialsThin-film TransistorsTwo-dimensional SemiconductorsField-effect Transistor Transfer CharacteristicsGate Oxide InterfacesGate Oxide LeakageLow-pressure Plasma TreatmentOxide Defect StatesOxide Thin-film TransistorsPlasma Treatment
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