Machining Science and Technology · 2019 · 16 citations · 33 references
EngineeringManufacturing EngineeringMaterials EngineeringManufacturing ProcessesMicrofabricationSurface EngineeringMachiningMetal FabricationMicrofabrication ProcessesMicromachiningDimensional AccuracyDimensional Accuracy AssessmentFabrication ProcessesMachining ProcessesMicro-toolingProcess ParametersProcess Parameters OptimizationSurface Roughness Parameters
Micro-milling is a fast, cheap and controlled process compared to other micro-fabrication processes such as lithography, laser/electron/ion beam machining, etc. However, scarcity of cutting tools of very small dimensions often results in limited application of micro-milling. In the present study, electro discharge machining (EDM) is used for fabrication of micro-end mill tool. To ensure high dimensional accuracy of the tool, a parametric study is conducted by replicating the a tungsten carbide block to a tungsten carbide (WC) block. The relationships between the drilled cavities on the block and the features on the micro-tool are established. The influence of machining parameters (voltage, capacitance and spindle speed) on the response variables (entrance diameter, hole depth, material removal rate (MRR) and surface roughness) is reported. Capacitance is found more dominant as compared to other selected process parameters. Using optimized parameters from the parametric study, a WC micro-end mill tool of 100 µm diameter is fabricated. Channel of around 110 µm width, 40 µm depth and surface roughness of 70 nm is successfully fabricated on aluminum. The performance of the fabricated tool is compared with a commercial end mill tool by milling micro channels on stainless steel.
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Muhammad P. Jahan, Y.S. Wong, M. Rahman · Journal of Materials Processing Technology · 2008 · 234 citations
Engineering, Electrical Engineering, Manufacturing Engineering +11
Journal of the Korean society of precision engineering
노형민 · 1993 · 222 citations
Engineering, Manufacturing Engineering, Applied Mechanics +7