High-Tactile Sensitivity of Piezoresistive Sensors With a Micro-Crack Structure Induced by Thin Film Tension

Abstract

In this letter, a simple high-performance piezoresistive tactile sensor based on polymer film micro-cracks is proposed. The cracks are automatically formed by the self-tension of the metal layer sputtered on the polydimethylsiloxane film and the sensing material Ti3C2, one type of two-dimensional piezoresistive MXenes material that is a two-dimensional transition metal carbide, nitride, and/or carbonitride with a multilayer structure, can be embedded into the cracks. The novel structure prevents MXenes from peeling during repeated compression and unloading. The piezoresistive tactile sensor exhibits excellent compressibility, high sensitivity of 516.74 kPa <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> , low tactile detection of 24.5 Pa, and a good reproducibility for 1400 cycles. Therefore, the sensors with micro-crack structures demonstrate bright prospects in the fields of electronic touchscreens and biological health activity detection.