Crystal Structure of Bi(OCMe2CH2OMe)3 and Its Use in the MOCVD of Bi2O3

Abstract

The crystal structure of the volatile bismuth alkoxide tris(1-methoxy-2-methyl-2-propanolato)bismuth(III), Bi(OCMe2-CH2OMe)3, 1, has been determined by single crystal X-ray diffraction (XRD). The complex is mononuclear, containing a six-coordinate BiIII atom in a distorted octahedral environment. Using a solution of 1 in heptane, thin films of bismuth oxide have been deposited by liquid injection metal–organic (MO) CVD. Deposition was carried out over a wide range of substrate temperatures (250–550 °C) and, using Auger electron spectroscopy (AES), films were shown to be pure bismuth oxide (Bi2O3) with no detectable carbon.