Near-Navigation Grade Tuning Fork MEMS Gyroscope

Abstract

We report performance results on a MEMS out-of-plane gyroscope suitable for platform stabilization. Angle random walk (ARW) less than 0.006 deg/rt-hr and median bias stabilities over temperature of 0.2 deg/hr have been achieved. Sensor bandwidth as characterized by drive and sense mode frequency separation is Hz allowing system level bandwidth greater than 300 Hz. The HG6900 IMU will integrate these sensors and serve platform stabilization applications in a 259 cm3 volume.