Concepedia

Plasma-induced damage and annealing repairing in ALD-Al2O3/PECVD-SiNx stacks

Shizheng Li, Ning Yang, Xiao Yuan, Xiaojun Ye, Liangxing Wang, Fei Zheng, Cui Liu, Hongbo Li

Materials Science in Semiconductor Processing · 2019 · 15 citations · 31 references

DOI

Concepts

References

31

The Evolution of Silicon Wafer Cleaning Technology

Werner Kern · Journal of The Electrochemical Society · 1990 · 1.7K citations

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Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells

G. Dingemans, W. M. M. Kessels · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 787 citations · Full text

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On the c-Si surface passivation mechanism by the negative-charge-dielectric Al2O3

Bram Hoex, J. J. H. Gielis, M. C. M. van de Sanden et al. · Journal of Applied Physics · 2008 · 538 citations · Full text

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Physics of semiconductors

Joseph Burton · Journal of the Franklin Institute · 1965 · 458 citations

Surface passivation of high‐efficiency silicon solar cells by atomic‐layer‐deposited Al<sub>2</sub>O<sub>3</sub>

Jan Schmidt, Agnes Merkle, Rolf Brendel et al. · Progress in Photovoltaics Research and Applications · 2008 · 453 citations

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