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The influence of Ar pressure on the structure and optical properties of non-hydrogenated a-Si thin films grown by rf magnetron sputtering onto room-temperature glass substrates

Materials ScienceMaterials EngineeringAr PressureOptical MaterialsEngineeringOptical PropertiesSilicon On InsulatorApplied PhysicsRf MagnetronThin FilmsAmorphous SolidEpitaxial GrowthOptoelectronicsThin Film Processing