Journal of The Electrochemical Society · 2019 · 38 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceElectrochemistryEnergy MaterialsMaterials ChemistryAtomic Layer DepositionBattery MaterialsBattery TechnologyIonic ConductivitySolid ElectrolytesSolid-state ElectrolytesConformal CoatingConformalityIon ConductivityLithium-ion ConductivityLithium-ion ConductorsOxide Solid ElectrolytesSolid Electrolyte CharacterizationSolid-state Lithium Batteries
All solid state 3D batteries are pursued for their increased safety and high power capabilities. At present conformal coating of the solid electrolyte remains one of the key hurdles for the implementation of such devices. In the present work we investigate atomic layer deposition (ALD) as means of conformal deposition of lithium phosphate (Li 3 PO 4 ) and nitrogen doped lithium phosphates (LiPON). These processes are characterized here to obtain the highest possible Li-ion conductivity. Li 3 PO 4 is shown to yield a conductivity of 10 -10 S/cm at 25C. On the other hand, an optimized LiPON process gave rise to a Li-ion conductivity of 510 -7 S/cm at 25C. In addition, good conformality of the LiPON process was shown on high aspect ratio pillars. Furthermore, a solid state battery device was fabricated comprising a Li 4 Ti 5 O 12 cathode, a 70 nm thick ALD LiPON solid electrolyte and a metallic lithium anode. This finding indicates that a layer down to 70 nm can be made pinhole free.
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Atomic Layer Deposition of the Solid Electrolyte LiPON
Alexander C. Kozen, Alexander J Pearse, Chuan‐Fu Lin et al. · Chemistry of Materials · 2015 · 276 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17