Concepedia

Conformality

Conformality is a thin-film deposition characteristic that denotes the uniform replication of the substrate's topography by the deposited film, distinguishing it from planar or non-uniform film growth mechanisms.

401

Publications

22.8K

Citations

1.3K

Authors

474

Institutions

Publications per year

2017–2026

104

Parents

Publications

401

Conformal invariance and surface critical behavior

John Cardy · Nuclear Physics B · 1984 · 1.1K citations

, , +12

Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing

H. Kim · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 541 citations

, , +17

Effect of boundary conditions on the operator content of two-dimensional conformally invariant theories

John Cardy · Nuclear Physics B · 1986 · 529 citations

, , +13

Conformality in atomic layer deposition: Current status overview of analysis and modelling

Véronique Cremers, Riikka L. Puurunen, Jolien Dendooven · Applied Physics Reviews · 2019 · 500 citations · Full text

, , +17

Geometric classification of conformal anomalies in arbitrary dimensions

Physics Letters B · 1993 · 474 citations · Full text

, , +8

1–5 of 401

Authors

1.3K

  1. SJ
    Stanley J. Brodsky

    SLAC National Accelerator Laboratory, United States

    22 publications · 1.3K citations

    18

    h-index

  2. XW
    Xing-Gang Wu

    Chongqing University, China

    27 publications · 1.2K citations

    18

    h-index

  3. WM
    W. M. M. Kessels

    Eindhoven University of Technology, Netherlands

    11 publications · 958 citations

    11

    h-index

  4. JS
    Jian-Ming Shen

    Chongqing University, China

    11 publications · 253 citations

    11

    h-index

  5. SW
    Sheng-Quan Wang

    Chongqing University, China

    14 publications · 324 citations

    11

    h-index

1–5 of 1.3K

Institutions

474

  1. SLAC National Accelerator Laboratory

    Menlo Park, United States

    21 h-index

    42 publications

    3K citations

  2. Chongqing University

    Chongqing, China

    19 h-index

    84 publications

    2.8K citations

  3. Stanford University

    Stanford, United States

    19 h-index

    40 publications

    2.3K citations

  4. IMEC

    Leuven, Belgium

    12 h-index

    89 publications

    2.3K citations

  5. Centre National de la Recherche Scientifique

    Paris, France

    10 h-index

    36 publications

    2.6K citations

  6. Stony Brook University

    Stony Brook, United States

    10 h-index

    10 publications

    615 citations

  7. Eindhoven University of Technology

    Eindhoven, The Netherlands

    10 h-index

    42 publications

    3.4K citations

  8. University of Helsinki

    Helsinki, Finland

    9 h-index

    34 publications

    3.5K citations

1–8 of 474

Venues

  1. Journal of High Energy Physics

    JHEP · 18 publications · 1.4K citations

    16

    h-index

  2. Journal of The Electrochemical Society

    JES · 18 publications · 1.2K citations

    16

    h-index

  3. 14

    h-index

  4. Physics Letters B

    13 publications · 949 citations

    13

    h-index

  5. 13

    h-index

1–5