2014 Solid-State, Actuators, and Microsystems Workshop Technical Digest · 2014 · 22 citations · 9 references
EngineeringElectrical EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsVibrationElastic PropertiesMems CharacterizationMems MaterialsMems ResonatorsNonlinear VibrationSilicon MaterialsBulk Mode ResonatorsNonlinear ResonatorsNonlinearityNonlinearity CharacterizationResonant Frequency MeasurementResonant MemsVibrational Mode Analysis
In this paper, we present measurements of the nonlinear amplitudefrequency (A-f) coefficients for three types of bulk-mode silicon MEMS resonators with different doping type and concentration. Our experimental results clearly show a strong dependence of the nonlinearity character on the orientation, doping level, and vibrational mode shape. These results indicate that the doping can have a significant impact on the character and strength of the elastic nonlinearities in MEMS devices.
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Nonlinear Limits for Single-Crystal Silicon Microresonators
V. Kaajakari, T. Mattila, A. Oja et al. · Journal of Microelectromechanical Systems · 2004 · 397 citations
Ultrasonics, Ferroelectrics, and Frequency Control
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