2012 · 32 citations · 8 references
EngineeringMechanical EngineeringAcousticsSensorsUltrasoundAcoustic SensingAcoustic Sensing SystemsAcoustic SensorsTransducer TechnologyUltrasonicsUltrasound InstrumentationAcoustic Transducer ArraysTransducer FabricationUltrasonic AcousticsUltrasonic SensingUltrasonic SensorsUltrasonic Transducer ArraysUltrasonic TransducersUltrasound Transducer Design
We describe a 2D ultrasonic depth sensor based an array of piezoelectric micromachined ultrasound transducer elements which measures range and direction to targets in air. The transducer consists of a single transmitter and seven receive elements arranged in a 6mm long linear array with half wavelength spacing. The system employs pulse-echo time-of-flight and difference of arrival time to determine target range and angle and operates up to a 750mm maximum range and 35 angle span with 3.5mm range and 3 angle worst case errors, respectively.
8
Sensor Review · 1999 · 6.1K citations · Full text
Natural Sciences, Electrical Engineering, Systems Engineering +9
Fundamentals of Physical Acoustics
Philippe Leclaire · Applied Acoustics · 2002 · 639 citations
Natural Sciences, Physics, Acoustics +10
CMOS-compatible AlN piezoelectric micromachined ultrasonic transducers
Stefon E. Shelton, Mei-Lin Chan, Hyunkyu Park et al. · 2009 · 132 citations
Natural Sciences, Electrical Engineering, Materials Science +15