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Influence of oxygen on sputtering of aluminum-gallium oxide films for deep-ultraviolet detector applications

Materials ScienceAluminium NitrideEngineeringPhysicsOptical PropertiesSurface ScienceApplied PhysicsDeep-ultraviolet Detector ApplicationsGallium OxideVacuum DeviceThin FilmsOptoelectronicsAluminum-gallium Oxide FilmsThin Film Processing