Low temperature epitaxy of high-quality Ge buffer using plasma enhancement via UHV-CVD system for photonic device applications - Concepedia

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Low temperature epitaxy of high-quality Ge buffer using plasma enhancement via UHV-CVD system for photonic device applications

18

Citations

32

References

2019

Year

Bader Alharthi, Wei Dou, Perry C. Grant, Joshua M. Grant, Timothy A. Morgan, Aboozar Mosleh, Wei Du, Baohua Li, Mansour Mortazavi, Hameed A. Naseem,

Applied Surface Science

PhotonicsElectrical EngineeringShort Wavelength OpticUhv-cvd SystemEngineeringLow Temperature EpitaxyApplied PhysicsHigh-quality Ge BufferPhotonic Integrated CircuitOptoelectronics

References

	Year	Citations

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