Low temperature epitaxy of high-quality Ge buffer using plasma enhancement via UHV-CVD system for photonic device applications

Bader Alharthi, Wei Dou, Perry C. Grant, Joshua M. Grant, Timothy A. Morgan, Aboozar Mosleh, Wei Du, Baohua Li, Mansour Mortazavi, Hameed A. Naseem,

Applied Surface Science · 2019 · 18 citations · 32 references

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