Concepedia

Realization of low dislocation density AlN on a small-coalescence-area nano-patterned sapphire substrate

Fujun Xu, L. S. Zhang, Nan Xie, M. X. Wang, Yong Sun, B. Y. Liu, Weikun Ge, Xinqiang Wang, Bo Shen

CrystEngComm · 2019 · 34 citations · 24 references

DOI

Concepts

Abstract

Growth behaviors of AlN on hexagonal configuration hole-type and truncated-cone-pillar-type nano-patterned sapphire substrates (NPSSs) have been investigated.

References

24

AlGaN photonics: recent advances in materials and ultraviolet devices

Dabing Li, Ke Jiang, Xiaojuan Sun et al. · Advances in Optics and Photonics · 2018 · 600 citations

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231–261nm AlGaN deep-ultraviolet light-emitting diodes fabricated on AlN multilayer buffers grown by ammonia pulse-flow method on sapphire

Hideki Hirayama, Tohru Yatabe, Norimichi Noguchi et al. · Applied Physics Letters · 2007 · 345 citations

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AlGaN-based deep UV LEDs grown on sputtered and high temperature annealed AlN/sapphire

Norman Susilo, Sylvia Hagedorn, Dominik Jaeger et al. · Applied Physics Letters · 2018 · 201 citations

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150 mW deep-ultraviolet light-emitting diodes with large-area AlN nanophotonic light-extraction structure emitting at 265 nm

Shin‐ichiro Inoue, Naoki Tamari, Manabu Taniguchi · Applied Physics Letters · 2017 · 196 citations · Full text

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Annealing of an AlN buffer layer in N<sub>2</sub>–CO for growth of a high-quality AlN film on sapphire

Hideto Miyake, Gou Nishio, Shuhei Suzuki et al. · Applied Physics Express · 2016 · 191 citations · Full text

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