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Lithiation of pure and methylated amorphous silicon: Monitoring by operando optical microscopy and ex situ atomic force microscopy

Materials ScienceAtomic Force MicroscopyEngineeringOperando Optical MicroscopyMicroscopyMicrofabricationSurface ScienceApplied PhysicsScanning Force MicroscopyAmorphous SiliconSemiconductor Device FabricationNanometrologyAmorphous SolidSilicon On Insulator