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High efficiency n-type silicon solar cells with passivating contacts based on PECVD silicon films doped by phosphorus diffusion

Electrical EngineeringEngineeringOrganic Solar CellPecvd Silicon FilmsApplied PhysicsBuilding-integrated PhotovoltaicsPhosphorus DiffusionSemiconductor Device FabricationSilicon On InsulatorSolar CellsPhotovoltaics