Publication | Closed Access
Rapid nanofabrication via UV-assisted selective etching on GaAs without templates
11
Citations
33
References
2019
Year
Materials ScienceEngineeringBeam LithographyMicrofabricationNanotechnologyRapid NanofabricationApplied PhysicsPattern TransferNanolithographyNanofabricationPlasma EtchingNanolithography Method
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