Thermal and radiation chemistry of butyltin oxo hydroxo: A model inorganic photoresist

Ryan T. Frederick, Sumit Saha, J. Trey Diulus, Feixiang Luo, Jenn M. Amador, Mengjun Li, Deok-Hie Park, Eric Garfunkel, Douglas A. Keszler, Gregory S. Herman

Microelectronic Engineering · 2018 · 40 citations · 39 references

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