Thermal and radiation chemistry of butyltin oxo hydroxo: A model inorganic photoresist - Concepedia

Concepedia

Publication | Open Access

Thermal and radiation chemistry of butyltin oxo hydroxo: A model inorganic photoresist

DOI Full Paper Access

33

Citations

39

References

2018

Year

Ryan T. Frederick, Sumit Saha, J. Trey Diulus, Feixiang Luo, Jenn M. Amador, Mengjun Li, Deok-Hie Park, Eric Garfunkel, Douglas A. Keszler, Gregory S. Herman

Microelectronic Engineering

Inorganic ChemistryChemical EngineeringEngineeringPhotochemistryInorganic PhotochemistryPhysical ChemistryButyltin Oxo HydroxoChemistryModel Inorganic PhotoresistRadiation ChemistryPhotochromism

References

	Year	Citations

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