Enhanced Flexible Piezoelectric Sensor by the Integration of P(VDF-TrFE)/AgNWs Film With a-IGZO TFT

Abstract

Flexible pressure sensors are important components in the future rollable touch screens, health care devices, electronic skins, and more. However, large-area array pressure sensors with small-size, good sensitivity, and the ability of detecting high-frequency dynamic force remain the key challenges for their practical applications. In this letter, we proposed a novel flexible piezoelectric pressure sensor system combined with a P(VDF-TrFE)/AgNWs thin film and an a-IGZO TFT. The doping of AgNWs into the P(VDF-TrFE) can improve the piezoelectric performance of P(VDF-TrFE) without high-voltage polarization and pressure stretching process, which are harmful to the performance of the TFT. With the combination of the a-IGZO TFT, this pressure sensor can be arrayed 4 $\times$ 4 in an active-matrix design with a dynamic force detecting ability (a response of 1100 mV/N), exhibiting good flexibility, fast response speed, high amplification, and lower energy consumption.