Structure and stress of Cu films prepared by high power pulsed magnetron sputtering - Concepedia

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Structure and stress of Cu films prepared by high power pulsed magnetron sputtering

22

Citations

26

References

2018

Year

Donglin Ma, P.P. Jing, Y.L. Gong, Baohua Wu, Qiaoyuan Deng, Y.T. Li, C.Z. Chen, Y.X. Leng, Nan Huang

Materials ScienceMaterials EngineeringCu FilmsEngineeringApplied PhysicsHigh PowerMagnetron SputteringThin FilmsPulsed Laser DepositionMicroelectronicsChemical DepositionThin Film ProcessingMicrostructure

References

	Year	Citations

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