Highly sensitive giant magnetoresistance (GMR) based ultra low differential pressure sensor

Review: Semiconductor Piezoresistance for Microsystems

A.A. Barlian, Woo‐Tae Park, Joseph R. Mallon et al. · Proceedings of the IEEE · 2009 · 932 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Micromachined pressure sensors: review and recent developments

William P. Eaton, James H. Smith · Smart Materials and Structures · 1997 · 583 citations · Full text

Engineering, Materials Science, Mechanical Engineering +17

Piezoresistive Properties of Silicon Diffused Layers

O. N. Tufte, E. L. Stelzer · Journal of Applied Physics · 1963 · 353 citations

Engineering, Materials Engineering, Materials Science +16

Capacitive sensors: When and how to use them

Robert Puers · Sensors and Actuators A Physical · 1993 · 327 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Batch-processed vacuum-sealed capacitive pressure sensors

A.V. Chavan, K.D. Wise · Journal of Microelectromechanical Systems · 2001 · 134 citations

Engineering, Electrical Engineering, Analog Electronics +13