Concepedia

Publication | Closed Access

Discharge parameters and plasma characterization in a dc magnetron with liquid Cu target

DOI

21

Citations

23

References

2018

Year

Andrey V. Kaziev, Alexander V. Tumarkin, Kseniya A. Leonova, D. V. Kolodko, Maksim M. Kharkov, Dmitry G. Ageychenkov
Vacuum

References

YearCitations

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