Fabrication of ZnO nanorods and Chitosan@ZnO nanorods on MEMS piezoresistive self-actuating silicon microcantilever for humidity sensing

Jiushuai Xu, Maik Bertke, Xiaojing Li, Haibo Mu, Hao Zhou, Yu Feng, Gerry Hamdana, Angelika Schmidt, H. Bremers, Erwin Peiner

Sensors and Actuators B Chemical · 2018 · 81 citations · 36 references

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