Publication | Closed Access

Fabrication of ZnO nanorods and Chitosan@ZnO nanorods on MEMS piezoresistive self-actuating silicon microcantilever for humidity sensing

Materials ScienceZno NanorodsEngineeringMicrofabricationNanotechnologyPiezoelectric NanogeneratorsApplied PhysicsNano Electro Mechanical SystemHumidity SensingMicro-electromechanical System