Maik Bertke

Piezoresistive microcantilevers for humidity sensing

Jiushuai Xu, Maik Bertke, Hutomo Suryo Wasisto et al. · Journal of Micromechanics and Microengineering · 2019 · 85 citations

Engineering, Materials Engineering, Materials Science +14

Fabrication of ZnO nanorods and Chitosan@ZnO nanorods on MEMS piezoresistive self-actuating silicon microcantilever for humidity sensing

Jiushuai Xu, Maik Bertke, Xiaojing Li et al. · Sensors and Actuators B Chemical · 2018 · 81 citations

Engineering, Materials Engineering, Materials Science +16

Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection

Maik Bertke, Gerry Hamdana, Wenze Wu et al. · Journal of Micromechanics and Microengineering · 2017 · 42 citations

Engineering, Materials Science, Mechanical Engineering +17

Nanoindentation of crystalline silicon pillars fabricated by soft UV nanoimprint lithography and cryogenic deep reactive ion etching

Gerry Hamdana, Prabowo Puranto, Jannick Langfahl‐Klabes et al. · Sensors and Actuators A Physical · 2018 · 38 citations

Engineering, Materials Engineering, Materials Science +16

Towards fabrication of 3D isotopically modulated vertical silicon nanowires in selective areas by nanosphere lithography

Gerry Hamdana, Tobias Südkamp, Marion Descoins et al. · Microelectronic Engineering · 2017 · 37 citations

Engineering, Materials Engineering, Materials Science +14