Maik Bertke

Piezoresistive microcantilevers for humidity sensing

Jiushuai Xu, Maik Bertke, Hutomo Suryo Wasisto et al. · Journal of Micromechanics and Microengineering · 2019 · 84 citations

Materials Science, Engineering, Flexible Electronics +4

Fabrication of ZnO nanorods and Chitosan@ZnO nanorods on MEMS piezoresistive self-actuating silicon microcantilever for humidity sensing

Jiushuai Xu, Maik Bertke, Xiaojing Li et al. · Sensors and Actuators B Chemical · 2018 · 79 citations

Materials Science, Zno Nanorods, Engineering +7

Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection

Maik Bertke, Gerry Hamdana, Wenze Wu et al. · Journal of Micromechanics and Microengineering · 2017 · 41 citations

Nanoindentation of crystalline silicon pillars fabricated by soft UV nanoimprint lithography and cryogenic deep reactive ion etching

Gerry Hamdana, Prabowo Puranto, Jannick Langfahl‐Klabes et al. · Sensors and Actuators A Physical · 2018 · 37 citations

Materials Science, Engineering, Crystalline Silicon Pillars +13

Towards fabrication of 3D isotopically modulated vertical silicon nanowires in selective areas by nanosphere lithography

Gerry Hamdana, Tobias Südkamp, Marion Descoins et al. · Microelectronic Engineering · 2017 · 36 citations

Materials Science, Engineering, Nanomaterials +11