Publication | Closed Access

Angle- and polarization resolved antireflection properties of black silicon prepared by electrochemical etching supported by external electric field

Materials ScienceElectrical EngineeringElectrochemical EtchingEngineeringMicrofabricationNanoelectronicsNanotechnologySurface ScienceApplied PhysicsBlack SiliconSemiconductor MaterialSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsPlasma EtchingExternal Electric Field