Publication | Closed Access
Towards universal plasma-enabled platform for the advanced nanofabrication: plasma physics level approach
33
Citations
113
References
2018
Year
EngineeringPhysicsMicrofabricationNanotechnologyApplied PhysicsApplied Plasma PhysicPlasma SciencePlasma PhysicsAdvanced NanofabricationPlasma ApplicationPlasma Processing
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