Concepedia
Sensors and Actuators A Physical · 2018 · 11 citations · 24 references
24
A new technique for measuring the mechanical properties of thin films
W. N. Sharpe, Biao Yuan, R. L. Edwards · Journal of Microelectromechanical Systems · 1997 · 393 citations
Engineering, Mechanical Engineering, Thin Film Process Technology +18
Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films
Toshiyuki Tsuchiya, Osamu Tabata, Jiro Sakata et al. · Journal of Microelectromechanical Systems · 1998 · 389 citations
Engineering, Mechanical Engineering, Hardness +18
Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM
Takahiro Namazu, Yoshitada Isono, Tomoki Tanaka · Journal of Microelectromechanical Systems · 2000 · 378 citations
Engineering, Micromechanics, Microscopy +19
Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon
W. N. Sharpe, Bin Yuan, Ranji Vaidyanathan et al. · 1997 · 269 citations
Engineering, Micromechanics, Mechanical Engineering +19
Micromechanical fracture strength of silicon
Fredric Ericson, Jan‐Åke Schweitz · Journal of Applied Physics · 1990 · 209 citations