Concepedia

DC reactively sputtered TiNx thin films for capacitor electrodes

Nana Sun, Jin Xu, Dayu Zhou, Peng Zhao, Shuaidong Li, Jingjing Wang, Shichao Chu, Faizan Ali

Journal of Materials Science Materials in Electronics · 2018 · 18 citations · 26 references

DOI

Concepts

References

26

Structure and properties of TiN coatings

J.‐E. Sundgren · Thin Solid Films · 1985 · 905 citations

, , +12

Incipient Ferroelectricity in Al‐Doped HfO<sub>2</sub> Thin Films

Stefan Mueller, Johannes Mueller, Aarti Singh et al. · Advanced Functional Materials · 2012 · 842 citations

, , +17

Reactive-sputter-deposited TiN films on glass substrates

Joshua Pelleg, Levy Zevin, S. Lungo et al. · Thin Solid Films · 1991 · 744 citations

, , +14

Effects of strain energy on the preferred orientation of TiN thin films

U Oh, Jung Ho Je · Journal of Applied Physics · 1993 · 407 citations · Full text

, , +15

Wake-up effects in Si-doped hafnium oxide ferroelectric thin films

Dayu Zhou, Jin Xu, Qing Li et al. · Applied Physics Letters · 2013 · 398 citations

, , +16