Publication | Closed Access
Effect of etching time on structure of p-type porous silicon
24
Citations
20
References
2018
Year
Materials ScienceMaterials EngineeringEngineeringMicrofabricationSurface ScienceApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsPlasma EtchingP-type Porous Silicon
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