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The defect evolution in homoepitaxial AlN layers grown by high-temperature metal–organic chemical vapor deposition
32
Citations
47
References
2018
Year
Materials EngineeringMaterials ScienceHomoepitaxial AlnAln/sapphire TemplatesEngineeringAluminium NitrideCrystalline DefectsCrystal Growth TechnologySurface ScienceApplied PhysicsHomoepitaxial Aln LayersDefect FormationDefect EvolutionThin FilmsChemical DepositionEpitaxial GrowthChemical Vapor Deposition
The defect evolution in homoepitaxial AlN grown by high-temperature metal–organic chemical vapor deposition on AlN/sapphire templates was studied.
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