Concepedia

Crystalline phase dependent electrical properties of Mg incorporated tetragonal phase stabilized ZrO2 high-κ dielectric layer in Si based MOS capacitors

J. Udaya Bhanu, A. Amutha, Ganguli Babu, B. Sundaravel, P. Thangadurai

Materials Science in Semiconductor Processing · 2018 · 14 citations · 42 references

DOI

Concepts

References

42

High-κ gate dielectrics: Current status and materials properties considerations

G. D. Wilk, Robert M. Wallace, J. Anthony · Journal of Applied Physics · 2001 · 5.8K citations

, , +16

High dielectric constant oxides

John Robertson · The European Physical Journal Applied Physics · 2004 · 1.7K citations · Full text

, , +19

SIMNRA, a simulation program for the analysis of NRA, RBS and ERDA

M. Mayer · AIP conference proceedings · 1999 · 942 citations

Poole-Frenkel Effect and Schottky Effect in Metal-Insulator-Metal Systems

J.G. Simmons · Physical Review · 1967 · 796 citations

, , +18

Zirconia-based solid electrolytes: microstructure, stability and ionic conductivity

S. P. S. Badwal · Solid State Ionics · 1992 · 528 citations

, , +4