DFB Laser Diodes Based on GaN Using 10th Order Laterally Coupled Surface Gratings

Abstract

Single longitudinal mode emission of laterally coupled distributed-feedback (LC-DFB) laser diodes (LDs) based on InGaN/GaN multiquantum-well structures containing 10th-order surface Bragg gratings with V-shaped grooves is demonstrated. The gratings were fabricated alongside a 2-μm-wide contact stripe by i-line stepper lithography and inductively coupled plasma etching. A single peak emission at 404.6 nm with a fullwidth at half-maximum of 0.04 nm was achieved at an output power of about 46 mW under pulsed laser operation. The shift of the lasing wavelength of LC-DFB LDs in the temperature range from 22 °C to 45 °C was around three times smaller than that of comparable ridge waveguide Fabry-Pérot LDs.