Publication | Closed Access
Effect of deposition pressure on the structural and optical properties of Ga<sub>2</sub>O<sub>3</sub>films obtained by thermal post-crystallization
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Citations
38
References
2017
Year
Amorphous Thin FilmsOptical MaterialsEngineeringCrystal Growth TechnologyThin Film Process TechnologyThermal AnnealingOptical PropertiesEpitaxial GrowthDeposition PressureThin Film ProcessingMaterials ScienceMaterials EngineeringCrystalline DefectsPhysicsGallium OxideThermal Post-crystallizationSurface ScienceCondensed Matter PhysicsApplied PhysicsThin FilmsAmorphous SolidChemical Vapor Deposition
β-Ga<sub>2</sub>O<sub>3</sub>films have been obtained by thermal annealing of amorphous thin films that were deposited by radio frequency magnetron sputtering.
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