Effect of deposition pressure on the structural and optical properties of Ga<sub>2</sub>O<sub>3</sub>films obtained by thermal post-crystallization

Yikai Liao, Shujie Jiao, Shaofang Li, Jinzhong Wang, Dongbo Wang, Shiyong Gao, Qingjiang Yu, Hongtao Li

CrystEngComm · 2017 · 62 citations · 39 references

Concepts

Abstract

β-Ga<sub>2</sub>O<sub>3</sub>films have been obtained by thermal annealing of amorphous thin films that were deposited by radio frequency magnetron sputtering.

References

39