Applied Surface Science · 2017 · 36 citations · 33 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsSurface ScienceThin FilmsThin-film DepositionDuty Cycle ControlDuty Cycle EffectsMagnetron SputteringReactive SputteringSputter DepositionSputteringSputtering ProcessesSputtering Techniques
33
W. C. Oliver, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26.6K citations
Natural Sciences, Materials Engineering, Materials Science +16