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Method for lateral force calibration in atomic force microscope using MEMS microforce sensor

EngineeringMicromachinesMicrofabricationCalibrationMicroscopyMechanical EngineeringMems Microforce SensorLateral Force CalibrationAtomic Force MicroscopeMicroelectromechanical SystemsScanning Force MicroscopyScanning Probe MicroscopyNanometrologyBiomedical EngineeringInstrumentationMicro-electromechanical System