Publication | Closed Access
Fast growth rate of epitaxial β–Ga2O3 by close coupled showerhead MOCVD
144
Citations
21
References
2017
Year
Materials ScienceMaterials EngineeringEngineeringCrystal Growth TechnologyOxide ElectronicsApplied PhysicsGallium OxideEpitaxial β–Ga2o3Molecular Beam EpitaxyEpitaxial GrowthShowerhead MocvdFast Growth Rate
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