Single-photon avalanche diodes in 018-μm high-voltage CMOS technology

Lin-Yun Huang, Jyh‐Horng Wu, J. P. Wang, C.M. Tsai, Yang-Tung Huang, Dai-Rong Wu, Sheng‐Di Lin

Optics Express · 2017 · 36 citations · 21 references

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Abstract

We have designed and fabricated high-performance single-photon avalanche diodes (SPADs) by using 0.18-µm high-voltage CMOS technology. Without any technology customization, the SPADs have low dark-count rate, high photon-detection probability, low afterpulsing probability, and acceptable timing jitter and breakdown voltage. Our design provides a low-cost and high-performance SPAD for various applications.

References

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