Ta2O5-based high-K dielectric thin films from solution processed at low temperatures - Concepedia

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Ta2O5-based high-K dielectric thin films from solution processed at low temperatures

40

Citations

20

References

2013

Year

Raluca Frunza, Brigita Kmet, Marko Jankovec, Marko Topič, Barbara Malič

Materials Research Bulletin

Materials ScienceLow TemperaturesEngineeringOxide ElectronicsApplied PhysicsMicrowave CeramicThin FilmsThin Film Processing

References

	Year	Citations

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